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The eld of microelectromechanical systems (MEMS), as it is called in the United States, or microsystems technology (MST), as it is called in Europe and elsewhere, deals with devices that are in the size range of micrometers To appreciate the size of MEMS, consider the size of traditional macroscale machines, which can be seen with the naked eye and are manufactured using traditional machining methods Some critical dimensions of the macromachinery can be very small (at the micrometer or even nanometer level), especially when they are used as precision instrumentation Even in those cases, they are not called micromachinery or MEMS because in the micro category the general dimensions, not just the smallest and critical dimensions, are in the size range of microns In MEMS, based on the current microfabrication technologies, the smallest dimension can be onetenth of a micrometer and the overall size of the device can be of the order of millimeters and sometimes even a centimeter In recent years, there has been signi cant interest in nanoscale systems This third category is clearly different from MEMS just as MEMS is different from macromachinery In nanoscale devices, the general dimensions are in the range of nanometers, and the smallest dimension can be as small as a few atoms across Thus, this category of devices is sometimes called molecular machinery MEMS is therefore in between macro- and nanoscale devices The MEMS technology is more than mere miniaturization of the macroscale devices and systems MEMS devices are not only smaller but are also more functional, faster, and cheaper than their macro counterparts The reasons for enhanced functionality are twofold First, there are advantages when some physical, chemical, and biological devices are scaled down to the micro level An example of this comes from numerous ways of modulating light using microoptomechanical devices comprising mechanical structures with feature sizes and movements in the range of wavelengths of visible light Likewise, microchemical reactors make it easier to have an extremely well-controlled environment for the reaction to take place and also lead the way to distributed microreactor arrays Second, complete integration of sensors, actuators, electronics, and components made of movable solids and uids is possible to an unprecedented degree This integration does not refer to just an assembled nal product composed of a variety of subsystems but to a truly integrated product that is conceived, designed, and fabricated in a uni ed manner Furthermore, MEMS devices can usually be operated at higher speeds than macrodevices because of the way in which their inertia, stiffness, and time constants of various phenomena scale when the size is decreased The micron-scale size of MEMS devices can be mainly attributed to the choice of material and the fabrication processes used to make them They could be made, for example, 10 to 100 times larger while still retaining their functional advantages over macrodevices However, the MEMS eld has its origins in microelectronics, as it was natural to make micromechanical components using the same fabrication processes used to make integrated chip (IC) circuits The economical bene ts of MEMS devices are a direct consequence of batch fabrication and of the well-developed microfabrication techniques of the IC industry As the MEMS eld progressed rapidly from the late eighties, traditional microfabrication techniques for MEMS have been substantially enhanced and a number of new techniques have been developed speci cally for MEMS The study of MEMS began with applications and is advancing rapidly with an increasing number of applications in a wide range of elds In the mid-1960s, researchers at Westinghouse Research Laboratories developed a resonant gate transistor that used gold beams that are only 100 microns long Miniaturized pressure sensors using silicon were built even before that In the 1960s and 1970s, a number of sensors and devices that used movable micromechanical elements were developed Tuning forks, accelerometers, projection dis-.

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